Syllabus - Nano Electronics (EC-702 (C))

Overview of semiconductor physics. Nanoscale band structure and Electron transport, Quantum confinement in semiconductor nanostructures: quantum wells, quantum wires, quantum dots, super-lattices, band offsets, and electronic density of states, heavily doped semiconductors and low dimensional quantum devices.

Introduction to lithography- Contact, proximity printing and Projection Printing, Resolution Enhancement techniques, overlay-accuracies, Mask-Error enhancement factor (MEEF), Positive and negative photoresists, Electron Lithography, Projection Printing, Direct writing, Electron resists.

Tunnel junction and applications of tunneling, Tunneling Through a Potential Barrier, Metal—Insulator, Metal-Semiconductor, and Metal-Insulator-Metal Junctions, Coulomb Blockade, Coulomb blockade in nanocapacitor, Tunnel Junctions, Tunnel Junction Excited by a Current Source.

Field Emission, Gate—Oxide Tunneling and Hot Electron Effects in nano MOSFETs, Theory of Scanning Tunneling Microscope, Double Barrier Tunneling and the Resonant Tunneling Diode. Nanoscale MOSFET, Finfets, charge and energy quantization in Single electron devices.

Scaling of physical systems – Geometric scaling & Electrical system scaling, Introduction to MEMS and NEMS, working principles, as micro sensors (acoustic wave sensor, biomedical and biosensor, chemical sensor, optical sensor, capacitive sensor, pressure sensor and thermal sensor), micro actuation (thermal actuation, piezoelectric actuation).